| Resolution |
High Vacuum mode: 3.0 nm(30kV) |
| Accelerating Voltage |
0.3 to 30 kV |
| Magnification |
x5 to 300,000 |
| Filament |
Pre-centered W hairpin filament (with continuous auto bias) |
| Objective Lens |
Super Conical lens
|
| Objective Lens Apertures |
Click-stop type (3-step variable)
Fine position controllable in X/Y directions |
| Maximum Specimen Size |
8" coverage, 12" specimen can be loaded |
| Specimen Stage |
5 axis computer controlled Eucentric goniometer
X=125mm, Y=100mm, Z=5 to 80mm
T= -10 to 90°, R=360° (endless) |
| Display LCD |
20 inch, high resolution FPD |
| Vacuum mode changeover |
Automatic (PC interface controlled) |
