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| MultBeam JIB-4500 Key Product Features |
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| SEM |
| Beam Source |
LaB6 |
| Accelerating Voltage |
0.3 to 30 kV (in steps) |
| Magnification |
5x to 300,000x |
| Goniometer Stage |
X: 76 mm; Y:76 mm: 5 to 48 mm
T: -10 to 90 degree; 360 degree endless |
| Maximum Beam Current |
1000 nA (at 30 kV) |
| Vacuum Pump |
SIP (x2), TMP/RP (x2) |
| FIB |
| Ion Source |
Ga liquid metal ion§ |
| Accelerating Voltage |
1.0 to 30 kV (in steps) |
| Magnification |
30X (wide view)
100x to 300,000x |
| Maximum beam Current |
30 nA (at 30 kV) |
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