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Microdisk lasers
Reducing size (scaling) of laser diodes is important for future integrated photonic circuits. Novel scaled devices we are exploring include the whispering gallery
mode microdisk laser developed at USC and shown in the picture.
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High speed polymer modulators
Photograph of a chip containing an
array of eight high speed optical modulators fabricated from electro-optic polymers. The upper electrodes of the micro-strip line can be seen. The buried ridge
optical waveguides in a Mach Zehnder interferometer configuration cannot be seen. Optical fibers are attached to couple the light into the optical waveguides and coaxial cables
are attached to couple the high speed signal onto the micro-strip line. |
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Microdisk optical resonator
Scanning electron microscope
image of a microdisk optical resonator coupled to linear waveguides. Coupling strength between waveguide and disk is
controlled by the thickness of epitaxially grown semiconductor layers. This microphotonic device can be used as a component in add-drop filter, resonant
detector, and resonant modulator sub-systems for future WDM applications. |
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Electron Cyclotron Resonance Etcher
Provides high-quality, low-damage, deep vertical etch capabilities to transfer photolithographic patterns to semiconductor substrates. The gases used in this system are argon, chlorine, oxygen, boron-trichloride, methane and hydrogen. The etching process is controlled by computer.
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