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THE OFS INSTRUMENT |
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The Optics Free Spectrometer analyzes the energy of ionized rare gas electrons. In this recently developed spectrometer the energy spectrum of incoming EUV photons is transformed directly into an electron energy spectrum by taking advantage of the photoelectric effect in one or several rare gases at low pressure (1 to 10 mTorr). This instrument has no degradable optical elements, a problem common to conventional optical spectometers, and it also eliminates the problem of multiple order separation.
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